- UV 성형을 통한 마이크로 렌즈 어레이의 제작
- ㆍ 저자명
- 김석민,임지석,강신일,전병희
- ㆍ 간행물명
- 소성가공
- ㆍ 권/호정보
- 2004년|13권 3호|pp.236-241 (6 pages)
- ㆍ 발행정보
- 한국소성가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
UV-molded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, nickel mold inserts for microlens arrays with lenses having diameters between $3mu extrm{m}$ and $230mu extrm{m}$ were fabricated by electroforming process. An UV-molding system was designed and constructed, a simple technique to avoid micro-air bubbles was first suggested, and the effects of the compression pressure and UV-curing dose on the replication quality of UV-molded microlens arrays with a diameter of $14mu extrm{m}$ were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analyzed.