Literature review on reliability test method for developing high performance optical/thermofluidic components. Since the miniaturization by the conventional mechanical process is limited to milli-structure, i.e. $10^{-3}m$, new technology for fabricating of mechanical components is needed to match cost, reliability, and integrability criteria of micro-structure. Although numbers of various researches on MEMS/MOEMS devices and components, including material characterization, design and optimization, system validation, etc., the lack of standards and specifications make the researches and developments difficult. For that reason, this paper is intended to propose the methods of reliability test for measuring the mechanical property of optical/ thermofluidic components.