A study has been made of surface modification of organic materials by ion implantation to increase the surface electrical properties. The substrate used were PET(polyethylene teraphtalate). N$^{＋}$, Ar$^{＋}$ implantation was peformed at energies of 40 keV and 50 keV with fluences from $5{ imes}10^{15}$, $1{ imes}10^{16}$,$7{ imes}10^{16}$, $1{ imes}10^{17}$/ ions/$cm^2$. UV/Vis, FT-IR and XPS spectroscopy measured for surface structure changes. Surface resistance decrease of implanted polymers was affected by ion implantation energy, ion species and ion dose rate. Surface conductivity of PET increased $2{ imes}10^{9}$/∼$2{ imes}10^{10}$/$Omega$/sq by ion implantation. Result of various spectroscopy analysis, the cause of increasing PET surface conductivity was expected to breaking C=O bonds. It was formation carbon network structure by promote cross-linking and create C-C, C=C bonds.