- 폐 SiC 슬러지를 이용하여 제조한 연속다공질 SiC-Si3N4 복합체의 미세조직
- ㆍ 저자명
- 이희정,장희동,이병택,Lee. Hee-Jung,Jang. Hee-Dong,Lee. Byong-Taek
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2005년|15권 3호|pp.177-182 (6 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Large amounts of the waste SiC sludge containing small amounts of Si and organic lubricant were produced during the wire cutting process of the single silicon crystal ingots. The waste SiC sludge was purified by the washing process and the purified SiC powders were used to fabricate continuously porous $SiC-Si_3N_4$ composites using a fibrous monolithic process, in which carbon, $6wt\%;Y_2O_3-2;wt\%;A1_2O_3$ and ethylene vinyl acetate were added as a pore-forming agent, sintering additives, and binder, respectively. In the burning-out process, carbon was fully removed and continuously porous $SiC-Si_3N_4$ composites were successfully fabricated. The green bodies containing SiC, Si particles and sintering additives were nitrided at $1410^{circ}C$ in a flowing $N_2+10\%;H_2$ gas mixture. Continuously porous composites were combined with SiC, ${alpha}Si_3N_4,;eta-Si_3N_4$ and a few $\%$ of Fe phases. The pore size of the 2nd and the 3rd passed $SiC-Si_3N_4$ composites was $260;{mu}m$ and $35;{mu}m$ in diameter, respectively.