- 펨토초 레이저를 이용한 형상 측정용 비동일 광경로 저결 맞음 간섭계
- ㆍ 저자명
- 오정석,김승우,Oh. Jeong-Seok,Kim. Seung-Woo
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2006년|23권 9호|pp.102-110 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light. Second, the high spatial coherence of femtosecond pulse lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.