- 깊이불연속 형상 측정을 위한 레이저 응용 하이브리드 초점법
- ㆍ 저자명
- 김경범,신영수,문순환,Kim. Gyung-Bum,Shin. Young-Su,Moon. Soon-Hwan
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2006년|23권 9호|pp.111-118 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A hybrid focus method with multiple laser slits is newly proposed for the measurement of surface morphology with depth discontinuity, and it is based on the integration of DFB and DFF. Rough depth information is estimated through calibration tables which are constructed by DFD with multiple laser slits, and then DFF is applied to only each specific depth range using the rough depth information resulting from DFD. The proposed hybrid method gives more accurate results than DFD and DFF, and faster measurement than DFF in the vicinity of depth discontinuity Its performance is verified through experiments of calibration blocks with sharp depth discontinuity.