- 알루미늄 하부층이 탄소나노튜브의 성장 및 전계방출 특성에 미치는 영향
- ㆍ 저자명
- 이승환,곽정춘,이한성,이내성,Lee. Seung-Hwan,Goak. Jeung-Choon,Lee. Han-Sung,Lee. Nae-Sung
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2008년|21권 2호|pp.162-172 (11 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We studied the effect of an Al underlayer on the growth of carbon nanotubes (CNTs) and their field emission characteristics, First of all, CNTs were grown on the Invar catalyst layers with different thickness of 1 to 10 nm, showing that the CNT length was saturated for the catalyst 5 nm or thicker. The CNTs grown on the 5-nm-thick catalyst were ${sim}10{mu}m$ long and ${sim}30nm$ in diameter. Second, an Al underlayer was applied between the catalyst layer and the Ti diffusion barrier to reduce the diameters of CNTs for better field emission properties by forming spherical Al oxide particles on which smaller catalyst nanoparticles would occur. The optimal thickness of an Al underlayer underneath the 5-nm-thick catalyst was ${sim}15nm$, producing the CNTs with the length of ${sim}15{mu}m$ and the diameter of ${sim}15nm$. The field emission measurements, following the tape activation, showed that the thinner and longer CNTs gave rise to better field emission performance with the lower turn-on and threshold electric fields.