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Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation
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  • Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation
  • Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation
저자명
Kim. Jong-Ahn,Kim. Jae-Wan,Kang. Chu-Shik,Eom. Tae-Bong
간행물명
International journal of precision engineering and manufacturing
권/호정보
2008년|9권 2호|pp.18-22 (5 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The pitch and orthogonality of two-dimensional (2-D) gratings were measured using a metrological atomic force microscope (MAFM), and the measurement uncertainty was analyzed. Gratings are typical standard devices for the calibration of precision microscopes, Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2-D gratings, it is important to certify the pitch and orthogonality of such gratings accurately for nanometrology. In the measurement of 2-D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme is required to overcome limitations such as thermal drift and slow scan speed. Two types of 2-D gratings with nominal pitches of 300 and 1000 nm were measured using line scans to determine the pitch measurement in each direction. The expanded uncertainties (k = 2) of the measured pitch values were less than 0.2 and 0.4 nm for each specimen, and the measured orthogonality values were less than $0.09^{circ}$ and $0.05^{circ}$, respectively. The experimental results measured using the MAFM and optical diffractometer agreed closely within the expanded uncertainty of the MAFM. We also propose an additional scheme for measuring 2-D gratings to increase the accuracy of calculated peak positions, which will be the subject of future study.