- Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation
- Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope with Uncertainty Evaluation
- ㆍ 저자명
- Kim. Jong-Ahn,Kim. Jae-Wan,Kang. Chu-Shik,Eom. Tae-Bong
- ㆍ 간행물명
- International journal of precision engineering and manufacturing
- ㆍ 권/호정보
- 2008년|9권 2호|pp.18-22 (5 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
