- Rugate 광결정에서 광학띠와 식각전류의 상관관계
- ㆍ 저자명
- 박종선,김용민,Park. Jongsun,Kim. Yongmin
- ㆍ 간행물명
- 조선자연과학논문집
- ㆍ 권/호정보
- 2009년|2권 3호|pp.207-210 (4 pages)
- ㆍ 발행정보
- 조선대학교 기초과학연구원
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Multiple rugate structures can be etched on a silicon wafer and placed in the same physical location, showing that many sharp spectral lines can be obtained in the optical reflectivity spectrum. Porous silicon samples were prepared by electrochemical etch of heavily doped p-type silicon wafers. The etching solution consisted of a 3:1 volume mixture of aqueous 48% hydrofluoric acid and absolute ethanol. Galvanostatic etch was carried out in a Teflon cell by using a two-electrode configuration with a Pt mesh counterelectrode. A sinusoidal current density waveform varying between 51.5 and $74.6mA/cm^2$ is applied. The anodization current was supplied by a Keithley 2420 high-precision constant current source which is controlled by a computer to allow the formation of PSi multilayer.