- 감습특성이 우수한 금속산화물계 습도센서 연구
- ㆍ 저자명
- 유도현,You. Do-Hyun
- ㆍ 간행물명
- 전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
- ㆍ 권/호정보
- 2009년|58권 10호|pp.1982-1988 (7 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$TiO_2$ films are fabricated using silk printing method. Heat treatment temperature of films is 600[$^{circ}C$]. From the analysis of microstructure, grain size of $TiO_2$ films is about $0.2{sim}0.3[{mu}m]$. Thickness of films is 30.19[${mu}m$] and surface uniformity of films is good. From the analysis of crystalline structure, $TiO_2$ films transform anatase phase to rutile phase. Capacitance of films increases according to increase relative humidity and decrease measuring frequency. Hysteresis characteristics of capacitance and impedance are best at 45[%RH] and 75[%RH] respectively. Impedance of films increases according to decrease measuring frequency.