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The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders
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  • The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders
  • The Quality Investigation of 6H-SiC Crystals Grown by a Conventional PVT Method with Various SiC Powders
저자명
Yeo. Im-Gyu,Lee. Tae-Woo,Lee. Won-Jae,Shin. Byoung-Chul,Choi. Jung-Woo,Ku. Kap-Ryeol,Kim. Young-Hee
간행물명
Transactions on electrical and electronic materials
권/호정보
2010년|11권 2호|pp.61-64 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we investigate the quality difference of SiC crystals grown by a conventional physical vapor transport method using various SiC powders. While the growth rate was revealed to be dependent upon the particle size of the SiC powder, the growth rate of SiC bulk crystals grown using SiC powder with a smaller particle size (20 nm) was definitely higher than those using lager particle sizes with $0.1-0.2;{mu}m$ and $1-10;{mu}m$, respectively. All grown 2 inch SiC single crystals were proven to be the polytype of 6H-SiC and the carrier concentration levels of about $10^{17};cm^3$ were determined from Hall measurements. It was revealed that the particle size and process method of SiC powder played an important role in obtaining a good quality, high growth rate, and to reduce growth temperature.