- 레이저를 이용한 폴리머 탄화현상 해석 및 LCD 제조공정에서의 응용
- ㆍ 저자명
- 안대환,박병구,김동언,김동식,Ahn. Dae-Hwan,Bak. Byoung-Gu,Kim. Dong-Eon,Kim. Dong-Sik
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2010년|27권 6호|pp.24-31 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Laser carbonization of a polymer layer can be employed in various applications in the microelectronics industry, e.g repairing brightness pixels of an LCD panel. In this work, the process of thermal degradation of LCD color filter polymer by various laser sources with pulsewidths from CW to fs is studied. LCD pixels are irradiated by the lasers and the threshold irradiance of LCD color filter polymer carbonization is experimentally measured. In the numerical analysis, the transient temperature distribution is calculated and the number density of carbonization in the polymer layer is also estimated. It is shown that all the lasers can carbonize the polymer layers if the output power is adjusted to meet the thermal conditions for polymerization and that pulsed lasers can result in more uniform distribution of temperature and carbonization than the CW laser.