- 반도체 및 디스플레이 산업에서의 레이저 가공 기술
- ㆍ 저자명
- 조광우,박홍진,Cho. Kwang-Woo,Park. Hong-Jin
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2010년|27권 6호|pp.32-38 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Laser material processing technology is adopted in several industry as alternative process which could overcome weakness and problems of present adopted process, especially semiconductor and display industry. In semiconductor industry, laser photo lithography is doing at front-end level, and cutting, drilling, and marking technology for both wafer and EMC mold package is adopted. Laser cleaning and de-flashing are new rising technology. There are 3 kinds of main display industry which use laser technology - TFT LCD, AMOLED, Touch screen. Laser glass cutting, laser marking, laser direct patterning, laser annealing, laser repairing, laser frit sealing are major application in display industry.