- 위상측정법을 이용한 LED Package의 3차원 형상 측정
- ㆍ 저자명
- 구자명,조태훈,Koo. Ja-Myoung,Cho. Tai-Hoon
- ㆍ 간행물명
- 반도체디스플레이기술학회지
- ㆍ 권/호정보
- 2011년|10권 1호|pp.17-22 (6 pages)
- ㆍ 발행정보
- 한국반도체디스플레이기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.