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외부챔버와 유연한 튜브로 연결된 LCD 패널 검사기 방진용 공기 스프링의 열 및 동적 연성거동에 대한 연구: PART I, 이론적 모델링
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  • 외부챔버와 유연한 튜브로 연결된 LCD 패널 검사기 방진용 공기 스프링의 열 및 동적 연성거동에 대한 연구: PART I, 이론적 모델링
저자명
석종원,이주홍,김필기,Seok. Jong-Won,Lee. Ju-Hong,Kim. Pil-Kee
간행물명
반도체디스플레이기술학회지
권/호정보
2011년|10권 1호|pp.33-41 (9 pages)
발행정보
한국반도체디스플레이기술학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Due to the recent quantum leaps forward in bio-, nano-, and information-technologies (BT, NT and IT), the precisionization and miniaturization of mechanical and electrical components are in high demand. In particular, the ITrelated equipments that take a great part in our domestic industry are in the area requiring high precision technologies. As a consequence, the researches on the development vibration isolation systems that diminish external disturbance or internal vibration are highly required. Among the components comprising the vibration isolation system, air spring has become on a focal point for the researchers due to its merits. This air spring is able to support heavy loads, keep a low natural frequency despite of having a lower value of stiffness, and control the performance of vibration isolation. However, sometimes the sole use of air spring is in demand due to some economic reasons. Under this circumstance, the damping effect of sole air spring may not enough to reduce sufficient amount of vibration. In this study, the air spring mount system connecting with an external chamber is proposed to increase or control the damping effect. To investigate its damping mechanism, the thermal and dynamic behaviors of the system is examined through a theoretical modeling approach in this part of research. In this approach, thermomechanical and Helmholtz resonator type models are to be employed for the air spring/external chambers and connecting tube system, respectively. The frequency response functions (FRFs) derived from the modeling effort are evaluated with physical parametric values and the effects of connecting tube length on these FRFs are identified through computer simulations.