- 혈압 측정을 위한 외팔보형 접촉힘 센서 어레이
- ㆍ 저자명
- 이병렬,정진우,전국진,Lee. Byeung-Leul,Jung. Jin-Woo,Chun. Kuk-Jin
- ㆍ 간행물명
- Journal of sensor science and technology
- ㆍ 권/호정보
- 2012년|21권 2호|pp.121-126 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{mu}m$ and $190{mu}m$, respectively. The gap between sensing elements is only $10{mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.