- MEMS 구동기를 이용한 마이크로 주사거울의 고유주파수 튜닝
- ㆍ 저자명
- 이재익,박선우,김종백,Lee. Jae-Ik,Park. Sunwoo,Kim. Jongbaeg
- ㆍ 간행물명
- 정보저장시스템학회논문집
- ㆍ 권/호정보
- 2014년|10권 1호|pp.23-26 (4 pages)
- ㆍ 발행정보
- 정보저장시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.