- TSV 기반 3차원 반도체 패키지 ISB 본딩기술
- ㆍ 저자명
- 이재학,송준엽,이영강,하태호,이창우,김승만,Lee. Jae Hak,Song. Jun Yeob,Lee. Young Kang,Ha. Tae Ho,Lee. Chang-Woo,Kim. Seung Man
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2014년|31권 10호|pp.857-863 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this work, we introduce various bonding technologies for 3D package and suggest Insert-Bump bonding (ISB) process newly to stack multi-layer chips successively. Microstructure of Insert-Bump bonding (ISB) specimens is investigated with respect to bonding parameters. Through experiments, we study on find optimal bonding conditions such as bonding temperature and bonding pressure and also evaluate in the case of fluxing and no-fluxing condition. Although no-fluxing bonding process is applied to ISB bonding process, good bonding interface at $270^{circ}C$ is formed due to the effect of oxide layer breakage.