The Electronic Interlocking unit in railway signalling system is safety-related facilities to determine route and speed for train running. In particular, the SSI(Solid State Interlocking) is Electronic Interlocking unit for high-speed railway, and it performs safety-critical function by MPM(Micro-Processor Module). Meanwhile, MPM is composed of the PES(Programmable Electronic System)-based system, and the PES-based system in railway safety-related facilities should be implemented by complying with the safety requirements defined in IEC 62425 and IEC 61508. In this paper, we performed modeling of failure rate and reliability for MPM implemented by fault tolerance methods and analyzed functional safety for MPM. Moreover, we determined SIL(Safety Integrity Level) for MPM according to the safety requirements defined in IEC 61508 based on an analyzed functional safety.