Decomposition of perfluorocompounds (PFCs) with the gliding arc plasma was investigated. The PFC gases treated in this study were CF4, NF3, and SF6. The arc was ignited at the shortest gap between the electrodes and the diluted PFC gas was injected through a nozzle located underneath the electrodes. Quantitative and qualitative analyses of the composition of the treated gases were performed by the Fourier Transform - Infrared Spectroscopy (FT-IR). The decomposition rate of CF4 was the lowest because of the highest stability of that. The maximum decomposition rates of CF4, NF3, and SF6 were about 82.7%, 98.8% and 98.9%, respectively. In addition, the solid powder identified as FeF3 was deposited inside the decomposition chamber.