- PLD법에 의한 14/50/50 PLZT박막의 제작과 특성평가
- ㆍ 저자명
- 박정흠,강종윤,장낙원,박용욱,최형욱,마석범
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2001년|14권 5호|pp.417-422 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The needs of new materials that substitute Si Oxide capacitor layer in high density DRAM increase. So in this paper, we choose the slim region 14/50/50 PLZT composition and fabricated thin films by PLD and estimated the characteristics for DRAM application. 14/50/50 PLZT thin films have crystallized into perovskite structure in the $600^{circ}C$ deposition temperature and 200 mTorr Oxygen pressure. In this condition, PLZT thin films had 985 dielectric constant, storage charge density 8.17 $mu$C/$ extrm{cm}^2$ and charging time 0.20ns. Leakage Current density was less than 10$^{-10}$ A/$ extrm{cm}^2$ until 5V bias voltage.